<  Back to the Polytechnique Montréal portal

Evidence of sub-10 nm aluminum-oxygen precipitates in silicon

Oussama Moutanabbir, D. Isheim, Mao Zugang and D. N. Seidman

Article (2016)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/34440/
Journal Title: Nanotechnology (vol. 27, no. 20)
Publisher: IOP Publishing
DOI: 10.1088/0957-4484/27/20/205706
Official URL: https://doi.org/10.1088/0957-4484/27/20/205706
Date Deposited: 18 Apr 2023 15:06
Last Modified: 05 Apr 2024 11:26
Cite in APA 7: Moutanabbir, O., Isheim, D., Zugang, M., & Seidman, D. N. (2016). Evidence of sub-10 nm aluminum-oxygen precipitates in silicon. Nanotechnology, 27(20), 7 pages. https://doi.org/10.1088/0957-4484/27/20/205706

Statistics

Dimensions

Repository Staff Only

View Item View Item