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Characterization of reactively evaporated TiN layers for diffusion barrier applications

Gérald Gagnon, John F. Currie, G. Beique, J. L. Brebner, S. C. Gujrathi and L. Ouellet

Article (1994)

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Additional Information: Nom historique du département: Département de métallurgie et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33292/
Journal Title: Journal of Applied Physics (vol. 75, no. 3)
Publisher: American Institute of Physics
DOI: 10.1063/1.356392
Official URL: https://doi.org/10.1063/1.356392
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:24
Cite in APA 7: Gagnon, G., Currie, J. F., Beique, G., Brebner, J. L., Gujrathi, S. C., & Ouellet, L. (1994). Characterization of reactively evaporated TiN layers for diffusion barrier applications. Journal of Applied Physics, 75(3), 1565-1570. https://doi.org/10.1063/1.356392

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