Gérald Gagnon, John F. Currie, G. Beique, J. L. Brebner, S. C. Gujrathi and L. Ouellet
Article (1994)
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| Additional Information: | Nom historique du département: Département de métallurgie et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/33292/ |
| Journal Title: | Journal of Applied Physics (vol. 75, no. 3) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.356392 |
| Official URL: | https://doi.org/10.1063/1.356392 |
| Date Deposited: | 18 Apr 2023 15:25 |
| Last Modified: | 25 Sep 2024 16:15 |
| Cite in APA 7: | Gagnon, G., Currie, J. F., Beique, G., Brebner, J. L., Gujrathi, S. C., & Ouellet, L. (1994). Characterization of reactively evaporated TiN layers for diffusion barrier applications. Journal of Applied Physics, 75(3), 1565-1570. https://doi.org/10.1063/1.356392 |
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