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Excimer laser for in situ processing in microelectronics

Michel Meunier, Patrick Desjardins, R. Izquierdo, M. Tabbal and M. Suys

Book Section (1994)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/33009/
Editors: L. D. Laude
Publisher: Kluwer Academic
DOI: 10.1007/978-94-015-8104-2_21
Official URL: https://doi.org/10.1007/978-94-015-8104-2_21
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Meunier, M., Desjardins, P., Izquierdo, R., Tabbal, M., & Suys, M. (1994). Excimer laser for in situ processing in microelectronics. In Laude, L. D. (ed.), Excimer lasers : The tools, fundamentals of their interactions with matter, field of applications (319-338). https://doi.org/10.1007/978-94-015-8104-2_21



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