Michel Meunier
, Patrick Desjardins, R. Izquierdo, M. Tabbal and M. Suys
Book Section (1994)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| ISBN: | 0792328191 |
| PolyPublie URL: | https://publications.polymtl.ca/33009/ |
| Editors: | L. D. Laude |
| Publisher: | Kluwer Academic |
| DOI: | 10.1007/978-94-015-8104-2_21 |
| Official URL: | https://doi.org/10.1007/978-94-015-8104-2_21 |
| Date Deposited: | 18 Apr 2023 15:25 |
| Last Modified: | 25 Sep 2024 16:15 |
| Cite in APA 7: | Meunier, M., Desjardins, P., Izquierdo, R., Tabbal, M., & Suys, M. (1994). Excimer laser for in situ processing in microelectronics. In Laude, L. D. (ed.), Excimer lasers : The tools, fundamentals of their interactions with matter, field of applications (pp. 319-338). https://doi.org/10.1007/978-94-015-8104-2_21 |
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