R. Berriche, P. Leroux and Ludvik Martinu
Paper (1995)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/32567/ |
| Conference Title: | International Symposium on Advanced Ceramics for Structural and Tribological Applications |
| Conference Location: | Vancouver, BC, CAN |
| Conference Date(s): | 1995-08-20 - 1995-08-24 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:14 |
| Cite in APA 7: | Berriche, R., Leroux, P., & Martinu, L. (1995, August). Evaluation of adhesion of thin films of Si₃N₄ and SiO₂ to si by the scratch method [Paper]. International Symposium on Advanced Ceramics for Structural and Tribological Applications, Vancouver, BC, CAN. |
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