M. Caron, Gérald Gagnon, Raymond Gauvin, P. Hovington, D. Drouin, John F. Currie, Y. Tremblay, L. Ouellet, M. Bigerger and F. Wong
Paper (1996)
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| Additional Information: | Nom historique du département: Département de métallurgie et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/31444/ |
| Conference Title: | 13th International VLSI Multilevel Interconnection (V-MIC) Conference |
| Conference Location: | Santa Clara, CA, USA |
| Conference Date(s): | 1996-06-18 - 1996-06-20 |
| Publisher: | VMIC |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:13 |
| Cite in APA 7: | Caron, M., Gagnon, G., Gauvin, R., Hovington, P., Drouin, D., Currie, J. F., Tremblay, Y., Ouellet, L., Bigerger, M., & Wong, F. (1996, June). An iterative procedure based on Monte Carlo simulation to determine the thickness and composition of VLSI metallization [Paper]. 13th International VLSI Multilevel Interconnection (V-MIC) Conference, Santa Clara, CA, USA. |
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