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An iterative procedure based on Monte Carlo simulation to determine the thickness and composition of VLSI metallization

M. Caron, Gérald Gagnon, Raymond Gauvin, P. Hovington, D. Drouin, John F. Currie, Y. Tremblay, L. Ouellet, M. Bigerger and F. Wong

Paper (1996)

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Additional Information: Nom historique du département: Département de métallurgie et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31444/
Conference Title: 13th International VLSI Multilevel Interconnection (V-MIC) Conference
Conference Location: Santa Clara, CA, USA
Conference Date(s): 1996-06-18 - 1996-06-20
Publisher: VMIC
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Caron, M., Gagnon, G., Gauvin, R., Hovington, P., Drouin, D., Currie, J. F., Tremblay, Y., Ouellet, L., Bigerger, M., & Wong, F. (1996, June). An iterative procedure based on Monte Carlo simulation to determine the thickness and composition of VLSI metallization [Paper]. 13th International VLSI Multilevel Interconnection (V-MIC) Conference, Santa Clara, CA, USA.

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