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Effect of the oxidation of TiN on the stability of the Al/TiN interface

Gérald Gagnon, S. C. Gujrathi, M. Caron, John F. Currie, Y. Tremblay, L. Ouellet, M. Biberger and R. Reynolds

Article (1996)

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Additional Information: Nom historique du département: Département de métallurgie et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31309/
Journal Title: Journal of Applied Physics (vol. 80, no. 1)
Publisher: American Institute of Physics
DOI: 10.1063/1.362804
Official URL: https://doi.org/10.1063/1.362804
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Gagnon, G., Gujrathi, S. C., Caron, M., Currie, J. F., Tremblay, Y., Ouellet, L., Biberger, M., & Reynolds, R. (1996). Effect of the oxidation of TiN on the stability of the Al/TiN interface. Journal of Applied Physics, 80(1), 188-195. https://doi.org/10.1063/1.362804

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