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Adhesion improvement of plasma-deposited silica thin films on stainless steel substrate studied by x-ray photoemission spectroscopy and in situ infrared ellipsometry

N. Bertrand, B. Drevillon, A. Gheorghiu, C. Senemaud, Ludvik Martinu and Jolanta-Ewa Sapieha

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29841/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.581013
Official URL: https://doi.org/10.1116/1.581013
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Bertrand, N., Drevillon, B., Gheorghiu, A., Senemaud, C., Martinu, L., & Sapieha, J.-E. (1998). Adhesion improvement of plasma-deposited silica thin films on stainless steel substrate studied by x-ray photoemission spectroscopy and in situ infrared ellipsometry. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(1), 6-12. https://doi.org/10.1116/1.581013

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