S. C. Gujrathi, S. Roorda, J. G. D'Arcy, R. L. Pflueger, Patrick Desjardins
, I. Petrov and J. E. Greene
Article (1998)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/29633/ |
| Journal Title: | Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms (vol. 136-138) |
| Publisher: | Elsevier |
| DOI: | 10.1016/s0168-583x(97)00881-1 |
| Official URL: | https://doi.org/10.1016/s0168-583x%2897%2900881-1 |
| Date Deposited: | 18 Apr 2023 15:23 |
| Last Modified: | 08 Apr 2025 02:19 |
| Cite in APA 7: | Gujrathi, S. C., Roorda, S., D'Arcy, J. G., Pflueger, R. L., Desjardins, P., Petrov, I., & Greene, J. E. (1998). Quantitative compositional depth profiling of Si₁₋ₓ₋yGeₓCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 136-138, 654-660. https://doi.org/10.1016/s0168-583x%2897%2900881-1 |
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