Quantitative compositional depth profiling of Si₁₋ₓ₋yGeₓCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry

S. C. Gujrathi, S. Roorda, J. G. D'Arcy, R. L. Pflueger, Patrick Desjardins , I. Petrov et J. E. Greene

Article de revue (1998)

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Département:	Département de génie physique
URL de PolyPublie:	https://publications.polymtl.ca/29633/
Titre de la revue:	Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms (vol. 136-138)
Maison d'édition:	Elsevier
DOI:	10.1016/s0168-583x(97)00881-1
URL officielle:	https://doi.org/10.1016/s0168-583x%2897%2900881-1
Date du dépôt:	18 avr. 2023 15:23
Dernière modification:	05 avr. 2024 11:18

Citer en APA 7:	Gujrathi, S. C., Roorda, S., D'Arcy, J. G., Pflueger, R. L., Desjardins, P., Petrov, I., & Greene, J. E. (1998). Quantitative compositional depth profiling of Si₁₋ₓ₋yGeₓCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 136-138, 654-660. https://doi.org/10.1016/s0168-583x%2897%2900881-1

Citer en APA 7:

Gujrathi, S. C., Roorda, S., D'Arcy, J. G., Pflueger, R. L., Desjardins, P., Petrov, I., & Greene, J. E. (1998). Quantitative compositional depth profiling of Si₁₋ₓ₋yGeₓCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 136-138, 654-660. https://doi.org/10.1016/s0168-583x%2897%2900881-1

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