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Quantitative compositional depth profiling of Si₁₋ₓ₋yGeₓCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry

S. C. Gujrathi, S. Roorda, J. G. D'Arcy, R. L. Pflueger, Patrick Desjardins, I. Petrov and J. E. Greene

Article (1998)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29633/
Journal Title: Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms (vol. 136-138)
Publisher: Elsevier
DOI: 10.1016/s0168-583x(97)00881-1
Official URL: https://doi.org/10.1016/s0168-583x%2897%2900881-1
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Gujrathi, S. C., Roorda, S., D'Arcy, J. G., Pflueger, R. L., Desjardins, P., Petrov, I., & Greene, J. E. (1998). Quantitative compositional depth profiling of Si₁₋ₓ₋yGeₓCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 136-138, 654-660. https://doi.org/10.1016/s0168-583x%2897%2900881-1

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