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Electron beam induced deposition of metallic tips and wires for microelectronics applications

I. Utke, B. Dwir, K. Leifer, Fabio Cicoira, P. Doppelt, P. Hoffmann and E. Kapon

Paper (1999)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL: https://publications.polymtl.ca/27773/
Conference Title: 25th International Conference on Micro- and Nano-Engineering
Conference Date(s): 1999-09-21 - 1999-09-23
Journal Title: Microelectronic Engineering (vol. 53, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/s0167-9317(00)00311-7
Official URL: https://doi.org/10.1016/s0167-9317%2800%2900311-7
Date Deposited: 18 Apr 2023 15:22
Last Modified: 25 Sep 2024 16:08
Cite in APA 7: Utke, I., Dwir, B., Leifer, K., Cicoira, F., Doppelt, P., Hoffmann, P., & Kapon, E. (1999, September). Electron beam induced deposition of metallic tips and wires for microelectronics applications [Paper]. 25th International Conference on Micro- and Nano-Engineering. Published in Microelectronic Engineering, 53(1-4). https://doi.org/10.1016/s0167-9317%2800%2900311-7

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