I. Utke, B. Dwir, K. Leifer, Fabio Cicoira, P. Doppelt, P. Hoffmann and E. Kapon
Paper (1999)
Document published while its authors were not affiliated with Polytechnique Montréal
An external link is available for this itemPolyPublie URL: | https://publications.polymtl.ca/27773/ |
---|---|
Conference Title: | 25th International Conference on Micro- and Nano-Engineering |
Conference Date(s): | 1999-09-21 - 1999-09-23 |
Journal Title: | Microelectronic Engineering (vol. 53, no. 1-4) |
Publisher: | Elsevier |
DOI: | 10.1016/s0167-9317(00)00311-7 |
Official URL: | https://doi.org/10.1016/s0167-9317%2800%2900311-7 |
Date Deposited: | 18 Apr 2023 15:22 |
Last Modified: | 25 Sep 2024 16:08 |
Cite in APA 7: | Utke, I., Dwir, B., Leifer, K., Cicoira, F., Doppelt, P., Hoffmann, P., & Kapon, E. (1999, September). Electron beam induced deposition of metallic tips and wires for microelectronics applications [Paper]. 25th International Conference on Micro- and Nano-Engineering. Published in Microelectronic Engineering, 53(1-4). https://doi.org/10.1016/s0167-9317%2800%2900311-7 |
---|---|
Statistics
Dimensions