Ivo Utke, B. Dwir, Klaus Leifer, Fabio Cicoira
, P. Doppelt, P. Hoffmann and E. Kapon
Paper (1999)
Document published while its authors were not affiliated with Polytechnique Montréal
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| PolyPublie URL: | https://publications.polymtl.ca/27773/ |
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| Conference Title: | 25th International Conference on Micro- and Nano-Engineering |
| Conference Date(s): | 1999-09-21 - 1999-09-23 |
| Journal Title: | Microelectronic Engineering (vol. 53, no. 1-4) |
| Publisher: | Elsevier |
| DOI: | 10.1016/s0167-9317(00)00311-7 |
| Official URL: | https://doi.org/10.1016/s0167-9317%2800%2900311-7 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 08 Apr 2025 02:17 |
| Cite in APA 7: | Utke, I., Dwir, B., Leifer, K., Cicoira, F., Doppelt, P., Hoffmann, P., & Kapon, E. (1999, September). Electron beam induced deposition of metallic tips and wires for microelectronics applications [Paper]. 25th International Conference on Micro- and Nano-Engineering. Published in Microelectronic Engineering, 53(1-4). https://doi.org/10.1016/s0167-9317%2800%2900311-7 |
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