J. Vlcek, K. Rusnak, V. Hajek and Ludvik Martinu
Abstract (2000)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/27759/ |
| Conference Title: | International Symposium on Trends and Applications of Thin Films (TATF 2000) |
| Conference Location: | Nancy, France |
| Conference Date(s): | 2000-03-28 |
| Journal Title: | Vide (vol. 54, no. 295 SUP1/4) |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 25 Sep 2024 16:08 |
| Cite in APA 7: | Vlcek, J., Rusnak, K., Hajek, V., & Martinu, L. (2000, March). Characterization of ion bombardment and optical emission spectroscopy in magnetron discharges for reactive sputtering of hard carbon nitride films [Abstract]. International Symposium on Trends and Applications of Thin Films (TATF 2000), Nancy, France. Published in Vide, 54(295 SUP1/4). |
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