J.-S. Chun, Patrick Desjardins
, I. Petrov, J. E. Greene, C. Lavoie and C. Jr. Cabral
Article (2001)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/27502/ |
| Journal Title: | Thin Solid Films (vol. 391, no. 1) |
| Publisher: | Elsevier |
| DOI: | 10.1016/s0040-6090(01)00938-5 |
| Official URL: | https://doi.org/10.1016/s0040-6090%2801%2900938-5 |
| Date Deposited: | 18 Apr 2023 15:21 |
| Last Modified: | 08 Apr 2025 02:17 |
| Cite in APA 7: | Chun, J.-S., Desjardins, P., Petrov, I., Greene, J. E., Lavoie, C., & Cabral, C. J. (2001). Interfacial reaction pathways and kinetics during annealing of epitaxial Al(001)/TiN(001) model diffusion barrier systems. Thin Solid Films, 391(1), 69-80. https://doi.org/10.1016/s0040-6090%2801%2900938-5 |
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