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Interfacial reaction pathways and kinetics during annealing of epitaxial Al(001)/TiN(001) model diffusion barrier systems

J.-S. Chun, Patrick Desjardins, I. Petrov, J. E. Greene, C. Lavoie and C. Jr. Cabral

Article (2001)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27502/
Journal Title: Thin Solid Films (vol. 391, no. 1)
Publisher: Elsevier
DOI: 10.1016/s0040-6090(01)00938-5
Official URL: https://doi.org/10.1016/s0040-6090%2801%2900938-5
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:15
Cite in APA 7: Chun, J.-S., Desjardins, P., Petrov, I., Greene, J. E., Lavoie, C., & Cabral, C. J. (2001). Interfacial reaction pathways and kinetics during annealing of epitaxial Al(001)/TiN(001) model diffusion barrier systems. Thin Solid Films, 391(1), 69-80. https://doi.org/10.1016/s0040-6090%2801%2900938-5

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