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Structural Properties of Silicon Dioxide Thin Films Densified by Medium-Energy Particles

A. Lefevre, L. J. Lewis, Ludvik Martinu and Michael R. Wertheimer

Article (2001)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27254/
Journal Title: Physical Review B (vol. 64, no. 11)
Publisher: American Physical Society
DOI: 10.1103/physrevb.64.115429
Official URL: https://doi.org/10.1103/physrevb.64.115429
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:14
Cite in APA 7: Lefevre, A., Lewis, L. J., Martinu, L., & Wertheimer, M. R. (2001). Structural Properties of Silicon Dioxide Thin Films Densified by Medium-Energy Particles. Physical Review B, 64(11), 115429-115429. https://doi.org/10.1103/physrevb.64.115429

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