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Growth of vacuum evaporated ultraporous silicon studied with spectroscopic ellipsometry and scanning electron microscopy

K. Kaminska, A. Amassian, Ludvik Martinu and K. Robbie

Article (2005)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24008/
Journal Title: Journal of Applied Physics (vol. 97, no. 1)
Publisher: American Institute of Physics
DOI: 10.1063/1.1823029
Official URL: https://doi.org/10.1063/1.1823029
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:09
Cite in APA 7: Kaminska, K., Amassian, A., Martinu, L., & Robbie, K. (2005). Growth of vacuum evaporated ultraporous silicon studied with spectroscopic ellipsometry and scanning electron microscopy. Journal of Applied Physics, 97(1). https://doi.org/10.1063/1.1823029

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