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Optical properties and microstructure of plasma deposited Ta₂O₅ and Nb₂O₅ films

H. Szymanowski, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2005)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/23640/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 23, no. 2)
Publisher: American Vacuum Society
DOI: 10.1116/1.1851544
Official URL: https://doi.org/10.1116/1.1851544
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:08
Cite in APA 7: Szymanowski, H., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2005). Optical properties and microstructure of plasma deposited Ta₂O₅ and Nb₂O₅ films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 23(2), 241-247. https://doi.org/10.1116/1.1851544

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