H. Szymanowski, O. Zabeida, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2005)
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| Department: | Department of Engineering Physics |
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| Research Center: | RQMP - Regroupement québécois sur les matériaux de pointe |
| PolyPublie URL: | https://publications.polymtl.ca/23640/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 23, no. 2) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.1851544 |
| Official URL: | https://doi.org/10.1116/1.1851544 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 08 Apr 2025 02:11 |
| Cite in APA 7: | Szymanowski, H., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2005). Optical properties and microstructure of plasma deposited Ta₂O₅ and Nb₂O₅ films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 23(2), 241-247. https://doi.org/10.1116/1.1851544 |
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