R. Vernhes, O. Zabeida, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2006)
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| Department: | Department of Engineering Physics |
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| Research Center: | RQMP - Regroupement québécois sur les matériaux de pointe |
| PolyPublie URL: | https://publications.polymtl.ca/22410/ |
| Journal Title: | Journal of Applied Physics (vol. 100, no. 6) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.2349565 |
| Official URL: | https://doi.org/10.1063/1.2349565 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 08 Apr 2025 02:10 |
| Cite in APA 7: | Vernhes, R., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2006). Pulsed radio frequency plasma deposition of a-SiNₓ:H alloys: film properties, growth mechanism, and applications. Journal of Applied Physics, 100(6), 63308-1. https://doi.org/10.1063/1.2349565 |
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