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High-Quality Flat-Top Micromachining of Silica by a CwCo₂ Laser

Lütfü Çelebi Ozcan, Vincent Tréanton, Raman Kashyap and Ludvik Martinu

Article (2007)

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Department: Department of Electrical Engineering
Department of Engineering Physics
Research Center: POLY-GRAMES - Advanced Research Centre in Microwaves and Space Electronics
PolyPublie URL: https://publications.polymtl.ca/21535/
Journal Title: IEEE Photonics Technology Letters (vol. 19, no. 7)
Publisher: IEEE
DOI: 10.1109/lpt.2007.893044
Official URL: https://doi.org/10.1109/lpt.2007.893044
Date Deposited: 18 Apr 2023 15:17
Last Modified: 09 May 2024 14:22
Cite in APA 7: Ozcan, L. Ç., Tréanton, V., Kashyap, R., & Martinu, L. (2007). High-Quality Flat-Top Micromachining of Silica by a CwCo₂ Laser. IEEE Photonics Technology Letters, 19(7), 459-461. https://doi.org/10.1109/lpt.2007.893044



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