Ion bombardment-induced enhancement of the properties of indium tin oxide films prepared by plasma-assisted reactive magnetron sputtering

M. Dudek, A. Amassian, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2009)

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Department:	Department of Engineering Physics
Research Center:	RQMP - Regroupement québécois sur les matériaux de pointe
PolyPublie URL:	https://publications.polymtl.ca/19682/
Journal Title:	Thin Solid Films (vol. 517, no. 16)
Publisher:	Elsevier
DOI:	10.1016/j.tsf.2009.01.012
Official URL:	https://doi.org/10.1016/j.tsf.2009.01.012
Date Deposited:	18 Apr 2023 15:14
Last Modified:	08 Apr 2025 02:06

Cite in APA 7:	Dudek, M., Amassian, A., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2009). Ion bombardment-induced enhancement of the properties of indium tin oxide films prepared by plasma-assisted reactive magnetron sputtering. Thin Solid Films, 517(16), 4576-4582. https://doi.org/10.1016/j.tsf.2009.01.012
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