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Ion bombardment-induced enhancement of the properties of indium tin oxide films prepared by plasma-assisted reactive magnetron sputtering

M. Dudek, A. Amassian, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2009)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/19682/
Journal Title: Thin Solid Films (vol. 517, no. 16)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2009.01.012
Official URL: https://doi.org/10.1016/j.tsf.2009.01.012
Date Deposited: 18 Apr 2023 15:14
Last Modified: 05 Apr 2024 11:02
Cite in APA 7: Dudek, M., Amassian, A., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2009). Ion bombardment-induced enhancement of the properties of indium tin oxide films prepared by plasma-assisted reactive magnetron sputtering. Thin Solid Films, 517(16), 4576-4582. https://doi.org/10.1016/j.tsf.2009.01.012

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