M. Guihard, P. Turcotte-Tremblay, Simon Gaudet, C. Coia, S. Roorda, Patrick Desjardins
, C. Lavoie, F. Schiettekatte
Article (2009)
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Journal Title
:
Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms
(
vol.
267
,
no.
8-9
)
Publisher:
Elsevier
Official URL:
OAI:
oai:publications.polymtl.ca:19521
ORCID
Date Deposited:
18 Apr 2023 15:14
Last Modified:
08 Oct 2026 17:12
Cite in APA 7:
Guihard, M., Turcotte-Tremblay, P., Gaudet, S., Coia, C., Roorda, S., Desjardins, P., Lavoie, C., & Schiettekatte, F. (2009). Controlling nickel silicide phase formation by Si implantation damage. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 267(8-9), 1285-1289. https://doi.org/10.1016/j.nimb.2009.01.149
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