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Controlling nickel silicide phase formation by Si implantation damage

M. Guihard, P. Turcotte-Tremblay, Simon Gaudet, C. Coia, S. Roorda, Patrick Desjardins, C. Lavoie and F. Schiettekatte

Article (2009)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/19521/
Journal Title: Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms (vol. 267, no. 8-9)
Publisher: Elsevier
DOI: 10.1016/j.nimb.2009.01.149
Official URL: https://doi.org/10.1016/j.nimb.2009.01.149
Date Deposited: 18 Apr 2023 15:14
Last Modified: 05 Apr 2024 11:02
Cite in APA 7: Guihard, M., Turcotte-Tremblay, P., Gaudet, S., Coia, C., Roorda, S., Desjardins, P., Lavoie, C., & Schiettekatte, F. (2009). Controlling nickel silicide phase formation by Si implantation damage. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 267(8-9), 1285-1289. https://doi.org/10.1016/j.nimb.2009.01.149

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