Controlling nickel silicide phase formation by Si implantation damage

M. Guihard, P. Turcotte-Tremblay, Simon Gaudet, C. Coia, S. Roorda, Patrick Desjardins, C. Lavoie and F. Schiettekatte

Article (2009)

An external link is available for this item

Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/19521/
Journal Title:	Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms (vol. 267, no. 8-9)
Publisher:	Elsevier
DOI:	10.1016/j.nimb.2009.01.149
Official URL:	https://doi.org/10.1016/j.nimb.2009.01.149
Date Deposited:	18 Apr 2023 15:14
Last Modified:	25 Sep 2024 15:57

Cite in APA 7:	Guihard, M., Turcotte-Tremblay, P., Gaudet, S., Coia, C., Roorda, S., Desjardins, P., Lavoie, C., & Schiettekatte, F. (2009). Controlling nickel silicide phase formation by Si implantation damage. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 267(8-9), 1285-1289. https://doi.org/10.1016/j.nimb.2009.01.149
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Répertoire des publications (EndNote)Simple Metadata

Statistics

Repository Staff Only