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Laser-induced resistance fine tuning of integrated polysilicon thin-film resistors

E. Boulais, J. Fantoni, A. Chateauneuf, Yvon Savaria and Michel Meunier

Article (2011)

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Department: Department of Engineering Physics
Department of Electrical Engineering
Research Center: GR2M - Microelectronics and Microsystems Research Group
PolyPublie URL: https://publications.polymtl.ca/17164/
Journal Title: IEEE Transactions on Electron Devices (vol. 58, no. 2)
Publisher: IEEE
DOI: 10.1109/ted.2010.2093770
Official URL: https://doi.org/10.1109/ted.2010.2093770
Date Deposited: 18 Apr 2023 15:11
Last Modified: 05 Apr 2024 10:58
Cite in APA 7: Boulais, E., Fantoni, J., Chateauneuf, A., Savaria, Y., & Meunier, M. (2011). Laser-induced resistance fine tuning of integrated polysilicon thin-film resistors. IEEE Transactions on Electron Devices, 58(2), 572-575. https://doi.org/10.1109/ted.2010.2093770

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