Effect of Si and C Concentration on the Microstructure, and the Mechanical, Tribological and Electrochemical Properties of Nanocomposite TiC/a-SiC:H/a-C:H Coatings Prepared by Plasma Enhanced Chemical Vapor Deposition

Duanjie Li, Salim Hassani, Suzie Poulin, Jerzy A. Szpunar, Ludvik Martinu et Jolanta-Ewa Sapieha

Article de revue (2012)

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Département:	Département de génie physique
URL de PolyPublie:	https://publications.polymtl.ca/15079/
Titre de la revue:	Journal of Applied Physics (vol. 111, no 4)
Maison d'édition:	American Institute of Physics
DOI:	10.1063/1.3684602
URL officielle:	https://doi.org/10.1063/1.3684602
Date du dépôt:	18 avr. 2023 15:11
Dernière modification:	05 avr. 2024 10:55

Citer en APA 7:	Li, D., Hassani, S., Poulin, S., Szpunar, J. A., Martinu, L., & Sapieha, J.-E. (2012). Effect of Si and C Concentration on the Microstructure, and the Mechanical, Tribological and Electrochemical Properties of Nanocomposite TiC/a-SiC:H/a-C:H Coatings Prepared by Plasma Enhanced Chemical Vapor Deposition. Journal of Applied Physics, 111(4). https://doi.org/10.1063/1.3684602
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