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Effect of Si and C Concentration on the Microstructure, and the Mechanical, Tribological and Electrochemical Properties of Nanocomposite TiC/a-SiC:H/a-C:H Coatings Prepared by Plasma Enhanced Chemical Vapor Deposition

Duanjie Li, Salim Hassani, Suzie Poulin, Jerzy A. Szpunar, Ludvik Martinu and Jolanta-Ewa Sapieha

Article (2012)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/15079/
Journal Title: Journal of Applied Physics (vol. 111, no. 4)
Publisher: American Institute of Physics
DOI: 10.1063/1.3684602
Official URL: https://doi.org/10.1063/1.3684602
Date Deposited: 18 Apr 2023 15:11
Last Modified: 05 Apr 2024 10:55
Cite in APA 7: Li, D., Hassani, S., Poulin, S., Szpunar, J. A., Martinu, L., & Sapieha, J.-E. (2012). Effect of Si and C Concentration on the Microstructure, and the Mechanical, Tribological and Electrochemical Properties of Nanocomposite TiC/a-SiC:H/a-C:H Coatings Prepared by Plasma Enhanced Chemical Vapor Deposition. Journal of Applied Physics, 111(4). https://doi.org/10.1063/1.3684602

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