 | Monter d'un niveau |
Amassian, A., Svec, M., Desjardins, P., & Martinu, L. (2006). Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: in situ spectroscopic ellipsometry and Monte Carlo study. Journal of Applied Physics, 100(6), 063526. Lien externe
Amassian, A., Svec, M., Desjardins, P., & Martinu, L. (2006). Interface broadening due to ion mixing during thin film growth at the radio-frequency-biased electrode in a plasma-enhanced chemical vapor deposition environment. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 24(6), 2061-2069. Lien externe
