Documents publiés en "2000"

Article de revue

Hallil, A., Zabeida, O., Wertheimer, M. R., & Martinu, L. (2000). Mass-Resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(3), 882-890. Lien externe

Zabeida, O., Hallil, A., Wertheimer, M. R., & Martinu, L. (2000). Time-Resolved Measurements of Ion Energy Distributions in Dual- Mode Pulsed-Microwave/Radio Frequency Plasma. Journal of Applied Physics, 88(2), 635-642. Lien externe