Documents publiés en "1994"

Département de génie physique

Meunier, M., Suys, M., Tabbal, M., Izquierdo, R., Yelon, A., & Sacher, E. (1994). Excimer laser-induced metallization for in situ processing on Si and GaAs. Applied Surface Science, 79(1-4), 208-214. Lien externe

Suys, M., Izquierdo, R., Sacher, E., & Meunier, M. (octobre 1994). Excimer laser chemical vapor deposition of copper from Cu(hfac) (TMVS) [Communication écrite]. Advanced Metallization for ULSI, Austin, Texas, USA. Non disponible