Documents publiés en "1993"

Article de revue

Diawara, Y., Lafontaine, H., Chaker, M., Kieffer, J. C., Pépin, H., Cochrane, R. W., Currie, J. F., Haghiri-Gosnet, A.-M., Ravet, M. F., & Rousseaux, F. (1993). Rapid thermal annealing for reducing stress in tungsten x-ray mask absorber. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, 11(2), 296-300. Lien externe

Commentaire ou lettre

Gagnon, G., Currie, J. F., Brebner, J. L., Gujrathi, S. C., & Ouellet, L. (1993). The use of elastic recoil detection for stoichiometry determination of reactively evaporated TiN layers [Commentaire ou lettre]. Journal of Applied Physics, 74(6), 4233-4235. Lien externe

Communication écrite

Bouchard, H., Azelmad, A., Currie, J. F., Meunier, M., Blain, S., & Darwall, T. (avril 1993). Thermal Stress in Doped Silicate Glasses (B,P) Deposited by PECVD and LPCVD [Communication écrite]. 1993 MRS Spring Meeting, San Francisco, CA. Publié dans MRS Proceedings, 308. Lien externe

Normandin, R., Dai, H., Janz, S., Delâge, A., Chatenoud, F., Létourneau, S., & Currie, J. F. (novembre 1993). Cross-section optimisation in NARROW harmonic surface emission waveguides [Communication écrite]. LEOS 1993, San Jose, CA, USA. Lien externe