Documents publiés en "1987"

Département de génie physique

Tessier, Y., Sapieha, J.-E., Poulin-Dandurand, S., Wertheimer, M. R., & Gujrathi, S. C. (1987). Silicon nitride from microwave plasma: fabrication and characterization. Canadian Journal of Physics, 65(8), 859-863. Lien externe

Wertheimer, M. R., Moisan, M., Sapieha, J.-E., & Claude, R. (août 1987). Effect of frequency from "low frequency" to microwave on the plasma deposition of thin films [Communication écrite]. 8th International Symposium on Plasma Chemistry (ISPC 1987), Tokyo, Japan. Lien externe