Michael R. Wertheimer
, M. Moisan, Jolanta-Ewa Sapieha and R. Claude
Paper (1987)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/66773/ |
| Conference Title: | 8th International Symposium on Plasma Chemistry (ISPC 1987) |
| Conference Location: | Tokyo, Japan |
| Conference Date(s): | 1987-08-31 - 1987-09-04 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc8/con... |
| Date Deposited: | 29 Jul 2025 15:37 |
| Last Modified: | 29 Jul 2025 15:37 |
| Cite in APA 7: | Wertheimer, M. R., Moisan, M., Sapieha, J.-E., & Claude, R. (1987, August). Effect of frequency from "low frequency" to microwave on the plasma deposition of thin films [Paper]. 8th International Symposium on Plasma Chemistry (ISPC 1987), Tokyo, Japan. https://www.ispc-conference.org/ispcdocs/ispc8/content/8/08-1253.pdf |
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