Silicon nitride from microwave plasma: fabrication and characterization

Yves Tessier, Jolanta-Ewa Sapieha, S. Poulin-Dandurand, Michael R. Wertheimer and S. C. Gujrathi

Article (1987)

An external link is available for this item

Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/69897/
Journal Title:	Canadian Journal of Physics (vol. 65, no. 8)
Publisher:	NRC Research Press
DOI:	10.1139/p87-132
Official URL:	https://doi.org/10.1139/p87-132
Date Deposited:	21 Nov 2025 09:19
Last Modified:	21 Nov 2025 09:19

Cite in APA 7:	Tessier, Y., Sapieha, J.-E., Poulin-Dandurand, S., Wertheimer, M. R., & Gujrathi, S. C. (1987). Silicon nitride from microwave plasma: fabrication and characterization. Canadian Journal of Physics, 65(8), 859-863. https://doi.org/10.1139/p87-132
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Simple Metadata

Statistics

Repository Staff Only