Oleg Vasilyevich Zabeida
PhD thesis (2000)
|
Published Version Terms of Use: All rights reserved. Download (6MB) |
Cite this document: | Zabeida, O. V. (2000). Study of ion bombardment characteristics in high frequency plasmas (PhD thesis, École Polytechnique de Montréal). Retrieved from https://publications.polymtl.ca/8885/ |
---|
Abstract
Categories of ions according to their energy -- Surface phenomena induced by low-energy ions -- Structure zone models -- Ion bombardment in high frequency plasmas -- Plasma definition -- Plasma sheath and ion bombardment energy -- Sheart in the radio frequency discharge -- Plasma systems -- Multigrid ion energy analyzer -- Hiden EQP-1000 plasma probe -- Rf-probe -- Surface treatment of polymers and complementary analysis -- Microwave plasma -- Continuous wave MW plasma -- MW/RF plasma -- Continuous wave rf and MW/rf plasmas -- Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma -- Ion energy characteristics in the cold cathode ion source system -- Effect of ion bombardment in polymer surface modification : comparison of pulsed high frequency plasma and ion beam.
![]() |
|
Additional Information: | Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/1017555054 |
---|---|
Department: | Département de génie physique |
Date Deposited: | 04 Aug 2021 11:05 |
Last Modified: | 25 Aug 2021 14:59 |
PolyPublie URL: | https://publications.polymtl.ca/8885/ |
Statistics
Total downloads
Downloads per month in the last year
Origin of downloads