Study of ion bombardment characteristics in high frequency plasmas

Abstract

Categories of ions according to their energy -- Surface phenomena induced by low-energy ions -- Structure zone models -- Ion bombardment in high frequency plasmas -- Plasma definition -- Plasma sheath and ion bombardment energy -- Sheart in the radio frequency discharge -- Plasma systems -- Multigrid ion energy analyzer -- Hiden EQP-1000 plasma probe -- Rf-probe -- Surface treatment of polymers and complementary analysis -- Microwave plasma -- Continuous wave MW plasma -- MW/RF plasma -- Continuous wave rf and MW/rf plasmas -- Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma -- Ion energy characteristics in the cold cathode ion source system -- Effect of ion bombardment in polymer surface modification : comparison of pulsed high frequency plasma and ion beam.