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Study of ion bombardment characteristics in high frequency plasmas

Oleg Vasilyevich Zabeida

PhD thesis (2000)

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Cite this document: Zabeida, O. V. (2000). Study of ion bombardment characteristics in high frequency plasmas (PhD thesis, École Polytechnique de Montréal). Retrieved from https://publications.polymtl.ca/8885/
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Abstract

Categories of ions according to their energy -- Surface phenomena induced by low-energy ions -- Structure zone models -- Ion bombardment in high frequency plasmas -- Plasma definition -- Plasma sheath and ion bombardment energy -- Sheart in the radio frequency discharge -- Plasma systems -- Multigrid ion energy analyzer -- Hiden EQP-1000 plasma probe -- Rf-probe -- Surface treatment of polymers and complementary analysis -- Microwave plasma -- Continuous wave MW plasma -- MW/RF plasma -- Continuous wave rf and MW/rf plasmas -- Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma -- Ion energy characteristics in the cold cathode ion source system -- Effect of ion bombardment in polymer surface modification : comparison of pulsed high frequency plasma and ion beam.

Open Access document in PolyPublie
Additional Information: Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/1017555054
Department: Département de génie physique
Date Deposited: 04 Aug 2021 11:05
Last Modified: 25 Aug 2021 14:59
PolyPublie URL: https://publications.polymtl.ca/8885/

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