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Commande nonlinéaire de micromirroirs[sic] électrostatiques

Carlos Gustavo Agudelo

Masters thesis (2008)

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Cite this document: Agudelo, C. G. (2008). Commande nonlinéaire de micromirroirs[sic] électrostatiques (Masters thesis, École Polytechnique de Montréal). Retrieved from https://publications.polymtl.ca/8881/
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Abstract

MEMS and their applications -- The micromirror : State-of-the-Art and Applications -- Modeling of torsional electrostatic micromirrors -- Tools for nonlinear control systems design -- Exact Feedback linearization -- Flat systems -- Control synthesis for electrostatic micromirrors -- Experimental implementation -- Instruments Calibration and Components Tuning -- Characteristics of the Micromirrors.

Uncontrolled Keywords

Microsystèmes optomécaniques; Dispositifs électro-optiques; Miroirs; Commande non linéaire

Open Access document in PolyPublie
Additional Information: Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/1017554824
Department: Département de génie électrique
Date Deposited: 04 Aug 2021 11:04
Last Modified: 25 Aug 2021 14:59
PolyPublie URL: https://publications.polymtl.ca/8881/

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