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Characterization of High Power Impulse Magnetron Sputtering Discharges

Matej Hala

Ph.D. thesis (2011)

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Department: Department of Engineering Physics
Program: Génie physique
Academic/Research Directors: Ludvik Martinu and Jolanta-Ewa Sapieha
PolyPublie URL: https://publications.polymtl.ca/742/
Institution: École Polytechnique de Montréal
Date Deposited: 26 Mar 2012 15:26
Last Modified: 01 Apr 2026 03:29
Cite in APA 7: Hala, M. (2011). Characterization of High Power Impulse Magnetron Sputtering Discharges [Ph.D. thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/742/

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