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Mechanical and optical properties of plasma deposited superhard nanocomposite coatings

Pawel Michal Jedrzejowski

PhD thesis (2004)

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Cite this document: Jedrzejowski, P. M. (2004). Mechanical and optical properties of plasma deposited superhard nanocomposite coatings (PhD thesis, École Polytechnique de Montréal). Retrieved from https://publications.polymtl.ca/7260/
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Abstract

Theorectical background to the materials science of hard coatings -- Experimental methodology and characterization -- Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN 1.3 coatings prepared by low temperature plasma enhanced chemical vapor deposition -- Optical characteristics and color of TiN/SiN1.3 nanocomposite coatings -- Mechanical and optical properties of hard SiCN coatings prepared by low temperature PECVD -- Quaternary hard nanocomposite TiCxNy/SiCN coatings prepared by PECVD.

Uncontrolled Keywords

Dépôt chimique en phase vapeur activé par plasma; Nanotechnologie; Revêtements; Couches minces; Nanomatériaux

Open Access document in PolyPublie
Additional Information: Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/57474622
Department: Département de génie physique
Date Deposited: 04 Aug 2021 11:05
Last Modified: 25 Aug 2021 14:57
PolyPublie URL: https://publications.polymtl.ca/7260/

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