Pawel Michal Jedrzejowski
PhD thesis (2004)
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Published Version Terms of Use: All rights reserved. Download (8MB) |
| Cite this document: | Jedrzejowski, P. M. (2004). Mechanical and optical properties of plasma deposited superhard nanocomposite coatings (PhD thesis, École Polytechnique de Montréal). Retrieved from https://publications.polymtl.ca/7260/ |
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Abstract
Theorectical background to the materials science of hard coatings -- Experimental methodology and characterization -- Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN 1.3 coatings prepared by low temperature plasma enhanced chemical vapor deposition -- Optical characteristics and color of TiN/SiN1.3 nanocomposite coatings -- Mechanical and optical properties of hard SiCN coatings prepared by low temperature PECVD -- Quaternary hard nanocomposite TiCxNy/SiCN coatings prepared by PECVD.
Uncontrolled Keywords
Dépôt chimique en phase vapeur activé par plasma; Nanotechnologie; Revêtements; Couches minces; Nanomatériaux
 Open Access document in PolyPublie |
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| Additional Information: | Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/57474622 |
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| Department: | Département de génie physique |
| Date Deposited: | 04 Aug 2021 11:05 |
| Last Modified: | 25 Aug 2021 14:57 |
| PolyPublie URL: | https://publications.polymtl.ca/7260/ |
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