Evolution of microstructure in Ti–Ta bilayer thin films on polycrystalline-Si and Si(001)

Ahmet S. Özcan, Karl Ludwig, C. Lavoie, Soumendra N. Basu, Cédrik Coia, C. Cabral, Kenneth P. Rodbell and J. M. E. Harper

Article (2004)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/67641/
Journal Title:	Thin Solid Films (vol. 466, no. 1-2)
Publisher:	Elsevier BV
DOI:	10.1016/j.tsf.2004.02.022
Official URL:	https://doi.org/10.1016/j.tsf.2004.02.022
Date Deposited:	14 Aug 2025 16:01
Last Modified:	14 Aug 2025 16:01

Cite in APA 7:	Özcan, A. S., Ludwig, K., Lavoie, C., Basu, S. N., Coia, C., Cabral, C., Rodbell, K. P., & E. Harper, J. M. (2004). Evolution of microstructure in Ti–Ta bilayer thin films on polycrystalline-Si and Si(001). Thin Solid Films, 466(1-2), 238-249. https://doi.org/10.1016/j.tsf.2004.02.022
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