A. Mackova, V. Perina, V. Hnatowicz, P. Supiot, C. Vivien, A. Bousquet, A. Granier, F. Boufayed, D. Escaich, P. Raynaud, Y. Segui, Gilles Dennler, Michael R. Wertheimer
, Z. Stryhal and J. Pavlik
Paper (2003)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/66746/ |
| Conference Title: | 16th International Symposium on Plasma Chemistry (ISPC 2003) |
| Conference Location: | Taormina, Italy |
| Conference Date(s): | 2003-06-22 - 2003-06-27 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc16/co... |
| Date Deposited: | 24 Jul 2025 13:24 |
| Last Modified: | 24 Jul 2025 13:24 |
| Cite in APA 7: | Mackova, A., Perina, V., Hnatowicz, V., Supiot, P., Vivien, C., Bousquet, A., Granier, A., Boufayed, F., Escaich, D., Raynaud, P., Segui, Y., Dennler, G., Wertheimer, M. R., Stryhal, Z., & Pavlik, J. (2003, June). Compared properties of Organosilicon films induced by RF and Microwave organosilicon/O₂ plasmas and afterglows [Paper]. 16th International Symposium on Plasma Chemistry (ISPC 2003), Taormina, Italy (5 pages). https://www.ispc-conference.org/ispcdocs/ispc16/complete/ISPC16_400_599.pdf#page=246 |
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