Energetics of reactions in an atmospheric pressure plasma jet with argon carrier gas and hexamethyldisiloxane reagent

We report on a methodology for measuring the energy dissipated per AC high voltage cycle in a cold atmospheric pressure plasma jet (CAPJet). This method is adapted from research by Nisol et al. on plasma polymerization of hexamethyldisiloxane (HMDSO) organosilicon vapor in a large area planar dielectric barrier discharge (DBD) reactor. Here too, we measured ΔEg, the energy difference with and without small HMDSO vapor concentrations in the argon carrier gas flow. From ΔEg we then derived Em, the energy per molecule, and compared values with those of Nisol. Good agreements were found, including in film structures determined from attenuated total reflectance (ATR) Fourier transform infrared (FTIR) spectra, thus suggesting that realistic Em values can be successfully obtained also for the CAPJet case.

Mots clés

argon carrier; atmospheric perssure plasma polymerization; energy measurement; HMDSO; plasma jet