<  Back to the Polytechnique Montréal portal

Doped SiO thin films for integrated optics and microelectronics

Pengnian Shen

Master's thesis (1991)

Open Access document in PolyPublie
[img]
Preview
Open Access to the full text of this document
Published Version
Terms of Use: All rights reserved
Download (4MB)
Show abstract
Hide abstract

Abstract

Method of preparation of solution deposited -- Thin films -- Determination of the film thickness and its index of refraction -- Determination of refractive index and thickness of solution deposited thin films on silicon and glass -- Normalised reflectance of absorbing films on absorbing or transparent substrates -- Experimental use of the normalised reflectance method -- Solution deposited SiO2 on Si, GaAs and InP -- Mechanical properties and film homogeneity -- Antireflective, protective and waveguide.

Department: Department of Engineering Physics
Program: Génie physique
Academic/Research Directors: John F. Currie and S. Iraj Najafi
PolyPublie URL: https://publications.polymtl.ca/56728/
Institution: École Polytechnique de Montréal
Date Deposited: 27 Nov 2023 13:43
Last Modified: 08 Apr 2024 10:17
Cite in APA 7: Shen, P. (1991). Doped SiO thin films for integrated optics and microelectronics [Master's thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/56728/

Statistics

Total downloads

Downloads per month in the last year

Origin of downloads

Repository Staff Only

View Item View Item