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Doped SiO thin films for integrated optics and microelectronics

Pengnian Shen

Master's thesis (1991)

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Method of preparation of solution deposited -- Thin films -- Determination of the film thickness and its index of refraction -- Determination of refractive index and thickness of solution deposited thin films on silicon and glass -- Normalised reflectance of absorbing films on absorbing or transparent substrates -- Experimental use of the normalised reflectance method -- Solution deposited SiO2 on Si, GaAs and InP -- Mechanical properties and film homogeneity -- Antireflective, protective and waveguide.

Department: Department of Engineering Physics
Program: Génie physique
Academic/Research Directors: John F. Currie and S. Iraj Najafi
PolyPublie URL: https://publications.polymtl.ca/56728/
Institution: École Polytechnique de Montréal
Date Deposited: 27 Nov 2023 13:43
Last Modified: 08 Apr 2024 10:17
Cite in APA 7: Shen, P. (1991). Doped SiO thin films for integrated optics and microelectronics [Master's thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/56728/


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