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Etching the oxide barrier of micrometer-scale self-organized porous anodic alumina membranes

Jonathan Bellemare, Louis-Philippe Carignan, Frédéric Sirois and David Ménard

Article (2015)

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Abstract

We develop a quantitative model to calculate the optimal experimental conditions for the etching of the oxide barrier of porous anodic alumina (PAA) membranes. The method is applied to a membrane fabricated at 370 V in a solution of 2% citric acid. The process creates a network of small pores at the bottom of the larger pores, which accelerates the oxide barrier etching relatively to the pore walls of the PAA membranes, when etched in a solution of phosphoric acid. The oxide barrier etching is confirmed by observation of PAA membranes using scanning electron microscopy, revealing the formation of the small pores and the preferential etching of the bottom of the pores rather than the pore walls. The proposed method, which leads to a better control over the fabrication of nanoporous templates, can be adapted to oxide barriers of different PAA membranes formed at different voltages and in different acids.

Uncontrolled Keywords

Computer systems organization; Architectures ; Other architectures; High-level language architectures; Reconfigurable computing; Hardware; Integrated circuits; Reconfigurable logic and FPGAs; Reconfigurable logic applications; Networks; Network architectures; Programming interfaces

Subjects: 3100 Physics > 3100 Physics
3100 Physics > 3101 Atomic and molecular studies
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/4777/
Journal Title: Journal of The Electrochemical Society (vol. 162, no. 4)
Publisher: IOP Science
DOI: 10.1149/2.0791504jes
Official URL: https://doi.org/10.1149/2.0791504jes
Date Deposited: 07 Apr 2021 11:08
Last Modified: 09 Apr 2024 01:14
Cite in APA 7: Bellemare, J., Carignan, L.-P., Sirois, F., & Ménard, D. (2015). Etching the oxide barrier of micrometer-scale self-organized porous anodic alumina membranes. Journal of The Electrochemical Society, 162(4), E47-E50. https://doi.org/10.1149/2.0791504jes

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