S. Schelz, C. F. M. Borges, Ludvik Martinu
and M. Moisan
Article (1997)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/41809/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 15, no. 5) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1116/1.580938 |
| Official URL: | https://doi.org/10.1116/1.580938 |
| Date Deposited: | 18 Apr 2023 15:23 |
| Last Modified: | 08 Apr 2025 07:06 |
| Cite in APA 7: | Schelz, S., Borges, C. F. M., Martinu, L., & Moisan, M. (1997). Chemical vapor deposition of diamond films on hydrofluoric acid etched silicon substrates. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 15(5), 2743-2749. https://doi.org/10.1116/1.580938 |
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