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Investigating strain in silicon-on-insulator nanostructures by coherent X-ray diffraction

Gang Xiong, Oussama Moutanabbir, Manfred Reiche, Ross Harder and Ian Robinson

Book Section (2018)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/40033/
Editors: Chunhai Fan and Zhentang Zhao
Publisher: Wiley
DOI: 10.1002/9783527697106.ch8
Official URL: https://doi.org/10.1002/9783527697106.ch8
Date Deposited: 18 Apr 2023 15:03
Last Modified: 05 Apr 2024 11:35
Cite in APA 7: Xiong, G., Moutanabbir, O., Reiche, M., Harder, R., & Robinson, I. (2018). Investigating strain in silicon-on-insulator nanostructures by coherent X-ray diffraction. In Fan, C., & Zhao, Z. (eds.), Synchrotron radiation in materials science (239-274). https://doi.org/10.1002/9783527697106.ch8

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