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Ion Assisted Thin Film Growth in Dual Microwave/Radio Frequency Plasmas

Ludvik Martinu and Michael R. Wertheimer

Article (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38282/
Journal Title: Materials Science Forum (vol. 140-142)
Publisher: Trans Tech Publications Ltd.
DOI: 10.4028/www.scientific.net/msf.140-142.405
Official URL: https://doi.org/10.4028/www.scientific.net/msf.140...
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Martinu, L., & Wertheimer, M. R. (1993). Ion Assisted Thin Film Growth in Dual Microwave/Radio Frequency Plasmas. Materials Science Forum, 140-142, 405-420. https://doi.org/10.4028/www.scientific.net/msf.140-142.405

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