Ludvik Martinu
and Michael R. Wertheimer
Article (1993)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38282/ |
| Journal Title: | Materials Science Forum (vol. 140-142) |
| Publisher: | Trans Tech Publications Ltd. |
| DOI: | 10.4028/www.scientific.net/msf.140-142.405 |
| Official URL: | https://doi.org/10.4028/www.scientific.net/msf.140... |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:22 |
| Cite in APA 7: | Martinu, L., & Wertheimer, M. R. (1993). Ion Assisted Thin Film Growth in Dual Microwave/Radio Frequency Plasmas. Materials Science Forum, 140-142, 405-420. https://doi.org/10.4028/www.scientific.net/msf.140-142.405 |
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