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Hard carbon films deposited under high ion flux

Ludvik Martinu, A. Raveh, A. Domingue, L. Bertrand, Jolanta-Ewa Sapieha, S. C. Gujrathi and Michael R. Wertheimer

Article (1992)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38281/
Journal Title: Thin Solid Films (vol. 208, no. 1)
Publisher: Elsevier
DOI: 10.1016/0040-6090(92)90945-8
Official URL: https://doi.org/10.1016/0040-6090%2892%2990945-8
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Martinu, L., Raveh, A., Domingue, A., Bertrand, L., Sapieha, J.-E., Gujrathi, S. C., & Wertheimer, M. R. (1992). Hard carbon films deposited under high ion flux. Thin Solid Films, 208(1), 42-47. https://doi.org/10.1016/0040-6090%2892%2990945-8



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