Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films

Ludvik Martinu, Jolanta-Ewa Sapieha and Michael R. Wertheimer

Article (1989)

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Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/38279/
Journal Title:	Applied Physics Letters (vol. 54, no. 26)
Publisher:	American Institute of Physics
DOI:	10.1063/1.101566
Official URL:	https://doi.org/10.1063/1.101566
Date Deposited:	18 Apr 2023 15:26
Last Modified:	25 Sep 2024 16:22

Cite in APA 7:	Martinu, L., Sapieha, J.-E., & Wertheimer, M. R. (1989). Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films. Applied Physics Letters, 54(26), 2645-2647. https://doi.org/10.1063/1.101566
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