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Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films

Ludvik Martinu, Jolanta-Ewa Sapieha and Michael R. Wertheimer

Article (1989)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38279/
Journal Title: Applied Physics Letters (vol. 54, no. 26)
Publisher: American Institute of Physics
DOI: 10.1063/1.101566
Official URL: https://doi.org/10.1063/1.101566
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Martinu, L., Sapieha, J.-E., & Wertheimer, M. R. (1989). Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films. Applied Physics Letters, 54(26), 2645-2647. https://doi.org/10.1063/1.101566

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