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Electrical properties of dual-frequency plasma deposited silicon-compound films

Ludvik Martinu, Jolanta-Ewa Sapieha, O. M. Kuttel and Michael R. Wertheimer

Paper (1990)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38278/
Conference Title: Annual Conference on Electrical Insulation and Dielectric Phenomena
Conference Location: Pocono Manor, PA, USA
Conference Date(s): 1990-10-28 - 1990-10-31
Publisher: IEEE
DOI: 10.1109/ceidp.1990.201339
Official URL: https://doi.org/10.1109/ceidp.1990.201339
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Martinu, L., Sapieha, J.-E., Kuttel, O. M., & Wertheimer, M. R. (1990, October). Electrical properties of dual-frequency plasma deposited silicon-compound films [Paper]. Annual Conference on Electrical Insulation and Dielectric Phenomena, Pocono Manor, PA, USA. https://doi.org/10.1109/ceidp.1990.201339

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