Dual microwave-r.f. plasma deposition of functional coatings

Sapieha, Jolanta-Ewa; Küttel, O. M.; Martinu, Ludvik; Wertheimer, Michael R.; Sapieha, Jolanta-Ewa; Küttel, O. M.; Martinu, Ludvik; Wertheimer, Michael R.

Dual microwave-r.f. plasma deposition of functional coatings

Jolanta-Ewa Sapieha , O. M. Küttel, Ludvik Martinu , Michael R. Wertheimer

Article (1990)

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Department:

Department of Engineering Physics

PolyPublie URL:

https://publications.polymtl.ca/38267/

Journal Title :

Thin Solid Films ( vol. 193 )

Publisher:

Elsevier

DOI:

10.1016/0040-6090(90)90251-8

Official URL:

https://doi.org/10.1016/0040-6090%2890%2990251-8

OAI:

oai:publications.polymtl.ca:38267

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Date Deposited:

18 Apr 2023 15:26

Last Modified:

14 Oct 2026 13:29

Cite in APA 7:

Sapieha, J.-E., Küttel, O. M., Martinu, L., & Wertheimer, M. R. (1990). Dual microwave-r.f. plasma deposition of functional coatings. Thin Solid Films, 193, 965-972. https://doi.org/10.1016/0040-6090%2890%2990251-8

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