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Dual microwave-r.f. plasma deposition of functional coatings

Jolanta-Ewa Sapieha, O. M. Küttel, Ludvik Martinu and Michael R. Wertheimer

Article (1990)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38267/
Journal Title: Thin Solid Films (vol. 193)
Publisher: Elsevier
DOI: 10.1016/0040-6090(90)90251-8
Official URL: https://doi.org/10.1016/0040-6090%2890%2990251-8
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Sapieha, J.-E., Küttel, O. M., Martinu, L., & Wertheimer, M. R. (1990). Dual microwave-r.f. plasma deposition of functional coatings. Thin Solid Films, 193, 965-972. https://doi.org/10.1016/0040-6090%2890%2990251-8

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