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Dual-Frequency Plasma Deposition of Hard Materials: Si-Compounds and DLC

Jolanta-Ewa Sapieha, Ludvik Martinu, A. Raveh and Michael R. Wertheimer

Paper (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38266/
Conference Title: 9th International Colloquium on Plasma processes (CIP 93)
Conference Location: Paris, France
Conference Date(s): 1993-06-06 - 1993-06-11
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Sapieha, J.-E., Martinu, L., Raveh, A., & Wertheimer, M. R. (1993, June). Dual-Frequency Plasma Deposition of Hard Materials: Si-Compounds and DLC [Paper]. 9th International Colloquium on Plasma processes (CIP 93), Paris, France.

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