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Surface contributions to the two-layer structure in the plasma deposition of a-Si : H

Edward Sacher, Jolanta-Ewa Sapieha, Michael R. Wertheimer, Henri P. Schreiber and R. Groleau

Article (1984)

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Department: Department of Chemical Engineering
Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38221/
Journal Title: Philosophical Magazine Part B (vol. 49, no. 4)
Publisher: Taylor & Francis
DOI: 10.1080/13642818408246519
Official URL: https://doi.org/10.1080/13642818408246519
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Sacher, E., Sapieha, J.-E., Wertheimer, M. R., Schreiber, H. P., & Groleau, R. (1984). Surface contributions to the two-layer structure in the plasma deposition of a-Si : H. Philosophical Magazine Part B, 49(4), L47-L52. https://doi.org/10.1080/13642818408246519

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