R. Claude, M. Moisan and Michael R. Wertheimer
Article (2011)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38147/ |
| Journal Title: | MRS Proceedings (vol. 68) |
| Publisher: | Cambridge University Press |
| DOI: | 10.1557/proc-68-85 |
| Official URL: | https://doi.org/10.1557/proc-68-85 |
| Date Deposited: | 18 Apr 2023 15:12 |
| Last Modified: | 08 Apr 2025 07:00 |
| Cite in APA 7: | Claude, R., Moisan, M., & Wertheimer, M. R. (2011). RF and Microwave Plasma Deposition of Polymer Films: Effect of Frequency. MRS Proceedings, 68. https://doi.org/10.1557/proc-68-85 |
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