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RF and Microwave Plasma Deposition of Polymer Films: Effect of Frequency

R. Claude, M. Moisan and Michael R. Wertheimer

Article (2011)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38147/
Journal Title: MRS Proceedings (vol. 68)
Publisher: Cambridge University Press
DOI: 10.1557/proc-68-85
Official URL: https://doi.org/10.1557/proc-68-85
Date Deposited: 18 Apr 2023 15:12
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Claude, R., Moisan, M., & Wertheimer, M. R. (2011). RF and Microwave Plasma Deposition of Polymer Films: Effect of Frequency. MRS Proceedings, 68. https://doi.org/10.1557/proc-68-85

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