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Laser-Assisted Low-Temperature Deposition of WSiₓ from WF₆ and SiH₄

R. Izquierdo, Patrick Desjardins, N. Elyaagoubi and Michel Meunier

Paper (1992)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
Funders: Fonds pour la Formation des Chercheurs, Aide à la Recherche (FCAR) du Québec, CRSNG / NSERC
PolyPublie URL: https://publications.polymtl.ca/35744/
Conference Title: Chemical Perspectives of Microelectronic Materials III
Conference Location: Boston, Mass.
Conference Date(s): 1992-11-30 - 1992-12-04
Journal Title: MRS Proceedings (vol. 282)
Publisher: Materials Research Society
DOI: 10.1557/proc-282-209
Official URL: https://doi.org/10.1557/proc-282-209
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Izquierdo, R., Desjardins, P., Elyaagoubi, N., & Meunier, M. (1992, November). Laser-Assisted Low-Temperature Deposition of WSiₓ from WF₆ and SiH₄ [Paper]. Chemical Perspectives of Microelectronic Materials III, Boston, Mass.. Published in MRS Proceedings, 282. https://doi.org/10.1557/proc-282-209

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