R. Izquierdo, Patrick Desjardins
, N. Elyaagoubi and Michel Meunier
Paper (1992)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| Funders: | Fonds pour la Formation des Chercheurs, Aide à la Recherche (FCAR) du Québec, CRSNG / NSERC |
| PolyPublie URL: | https://publications.polymtl.ca/35744/ |
| Conference Title: | Chemical Perspectives of Microelectronic Materials III |
| Conference Location: | Boston, Mass. |
| Conference Date(s): | 1992-11-30 - 1992-12-04 |
| Journal Title: | MRS Proceedings (vol. 282) |
| Publisher: | Materials Research Society |
| DOI: | 10.1557/proc-282-209 |
| Official URL: | https://doi.org/10.1557/proc-282-209 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Izquierdo, R., Desjardins, P., Elyaagoubi, N., & Meunier, M. (1992, November). Laser-Assisted Low-Temperature Deposition of WSiₓ from WF₆ and SiH₄ [Paper]. Chemical Perspectives of Microelectronic Materials III, Boston, Mass.. Published in MRS Proceedings, 282. https://doi.org/10.1557/proc-282-209 |
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