Patrick Desjardins
, R. Izquierdo and Michel Meunier
Article (1993)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/35725/ |
| Journal Title: | Journal of Applied Physics (vol. 73, no. 10) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.353749 |
| Official URL: | https://doi.org/10.1063/1.353749 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Desjardins, P., Izquierdo, R., & Meunier, M. (1993). Diode laser induced chemical vapor deposition of WSiₓ on TiN from WF₆ and SiH₄. Journal of Applied Physics, 73(10), 5216-5216. https://doi.org/10.1063/1.353749 |
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