Ludvik Martinu
, Jolanta-Ewa Sapieha and Michael R. Wertheimer
Paper (1994)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/33034/ |
| Conference Title: | 4th IEEE International Conference on Properties and Applications of Dielectric Materials |
| Conference Location: | Brisbane, Aust |
| Conference Date(s): | 1994-07-03 - 1994-07-08 |
| Publisher: | IEEE |
| DOI: | 10.1109/icpadm.1994.413980 |
| Official URL: | https://doi.org/10.1109/icpadm.1994.413980 |
| Date Deposited: | 18 Apr 2023 15:25 |
| Last Modified: | 25 Sep 2024 16:15 |
| Cite in APA 7: | Martinu, L., Sapieha, J.-E., & Wertheimer, M. R. (1994, July). Dual-frequency plasma deposition of high quality insulating thin films [Paper]. 4th IEEE International Conference on Properties and Applications of Dielectric Materials, Brisbane, Aust. https://doi.org/10.1109/icpadm.1994.413980 |
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