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Dual-frequency plasma deposition of high quality insulating thin films

Ludvik Martinu, Jolanta-Ewa Sapieha and Michael R. Wertheimer

Paper (1994)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33034/
Conference Title: 4th IEEE International Conference on Properties and Applications of Dielectric Materials
Conference Location: Brisbane, Aust
Conference Date(s): 1994-07-03 - 1994-07-08
Publisher: IEEE
DOI: 10.1109/icpadm.1994.413980
Official URL: https://doi.org/10.1109/icpadm.1994.413980
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Martinu, L., Sapieha, J.-E., & Wertheimer, M. R. (1994, July). Dual-frequency plasma deposition of high quality insulating thin films [Paper]. 4th IEEE International Conference on Properties and Applications of Dielectric Materials, Brisbane, Aust. https://doi.org/10.1109/icpadm.1994.413980

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