ERD-TOF characterization of silicon-compound multilayer and graded-index optical coatings

S. C. Gujrathi, D. Poitras, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (1996)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/31272/
Journal Title:	Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms (vol. 118, no. 1-4)
Publisher:	Elsevier
DOI:	10.1016/0168-583x(95)01117-x
Official URL:	https://doi.org/10.1016/0168-583x%2895%2901117-x
Date Deposited:	18 Apr 2023 15:24
Last Modified:	08 Apr 2025 06:51

Cite in APA 7:	Gujrathi, S. C., Poitras, D., Sapieha, J.-E., & Martinu, L. (1996). ERD-TOF characterization of silicon-compound multilayer and graded-index optical coatings. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 118(1-4), 560-565. https://doi.org/10.1016/0168-583x%2895%2901117-x
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